Semiconductor equipment MOCVD thermal field solution
Detailed Description
Solution Advantages
| 1 | MCOVD outer High-density, high-performance rhenium plate precision-rolled rhenium sheet, precision electron beam welding, perfect surface treatment to achieve high emissivity. |
2 | MCOVD Middle High-purity tungsten plate is cut with slow-moving wire to ensure the stable high-temperature performance and finished size of the tungsten ring. |
3 | MCOVD inner Rhenium plate with high density and excellent performance is precision-rolled thin rhenium sheet, the mold is bent, the high temperature heat treatment can effectively prevent the deformation of the rhenium ring during high temperature use. |
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