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Semiconductor equipment MOCVD thermal field solution

Detailed Description

Solution Advantages

 

MCOVD outer
High-density, high-performance rhenium plate precision-rolled rhenium sheet, precision electron beam welding, perfect surface treatment to achieve high emissivity.
 2  MCOVD Middle
High-purity tungsten plate is cut with slow-moving wire to ensure the stable high-temperature performance and finished size of the tungsten ring.
 3  MCOVD inner
Rhenium plate with high density and excellent performance is precision-rolled thin rhenium sheet, the mold is bent, the high temperature heat treatment can effectively prevent the deformation of the rhenium ring during high temperature use.